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Source RCUK EPSRC Data

Details for Topic Number 759

film thin deposition oxide cvd material layer growth substrate form large vapour chemical thicknes bulk

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Words in Topic

385 - film

234 - thin

75 - deposition

53 - oxide

50 - cvd

43 - material

33 - layer

31 - growth

28 - substrate

26 - form

26 - large

26 - vapour

25 - chemical

25 - thicknes

23 - bulk

Key Grants