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Details for Topic Number 631

mem mechanical resonator micro electro system nem sensor fabrication signal mas cost displacement factor gyroscope

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Words in Topic

87 - mem

36 - mechanical

35 - resonator

23 - micro

20 - electro

20 - system

19 - nem

19 - sensor

14 - fabrication

12 - signal

11 - mas

10 - cost

10 - displacement

10 - factor

10 - gyroscope

Key Grants